A Micro Amperometric Immunosensor Based on MEMS

• 作 者: Chao Bian Yuanyuan Xu Hongguan
• 机 构: StateKeyLabofTransducerTechnology
• 出 处: 稀有金属材料与工程
• 发表日期: 2006年A03期
• 基金项目: Acknowledgement： The authors greatly acknowledge the financial support from the National Natural Science Foundation of China （Grant No. 90307014）

<正>A micro amperometric immunosensor with the sensitive area of only 1mm~2 was fabricated on silicon using the technique of Micro-Electro-Mechanical Systems (MEMS).A double exposure of SU-8 photoresist process was developed to create both the sensit