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本专利介绍一种光学调制器型静态驱动探测器,该探测器由一个定子电极组(6)组成,定子电极组包括3个相同形状的电极。这3个电极以相等的距离固定在衬底(4)的不同位置上。
This patent describes an optical modulator type static drive detector consisting of a stator electrode set (6), which includes three electrodes of the same shape. These three electrodes are fixed at different distances on different positions of the substrate (4).