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在超高真空（１０￣（－７）ｐａ）条件下用双源蒸镀法在单晶Ｓｉ和ＮａＣｌ衬底上制备了一系列Ｆｅ、Ｄｙ原子配比的成分调制多层膜。用卢瑟福背散时（ＲＢＳ）和俄歇能谱（ＡＥＳ）分析成分沿厚度的分布，并用掠入射ｘ射线衍射分析（ＸＲＤ）离子束混合前后的结构。结果表明，随Ａｒ离子剂量的增加混合量增加，在１０￣（１７）Ａｒ／ｃｍ￣２达到均匀混合，同时混合还诱发非晶化，平均成分约为Ｆｅ＿（６０）Ｄｙ＿（４０）的多晶膜完全转变为非晶态，Ｆｅ含量高于６０ａｔ％，有残余ｂｃｃ－Ｆｅ，反之，Ｄｙ含量高于４０ａｔ％，有残余ｈｃｐ－Ｄｙ．
A series of compositionally modulated multilayer films with Fe and Dy atomic ratios were prepared on single crystal Si and NaCl substrates by dual source evaporation under ultra-high vacuum (10 ~ (-7) Pa). The composition distribution along the thickness was analyzed using Rutherford backscattering (RBS) and Auger energy dispersive spectroscopy (AES), and the structures before and after ion beam mixing were analyzed by grazing incidence X-ray diffraction (XRD). The results showed that with the increase of Ar ion dosage, the mixing amount increased and reached the uniform mixing at 10 ~ (17) Ar / cm ~ 2, while the amorphization was also induced by the mixing. The average composition was about 60% Dy_ (40) The crystal film completely transformed into an amorphous state, Fe content higher than 60at%, there is residual bcc-Fe, conversely, Dy content higher than 40at%, residual hcp-Dy.