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基于双轴双折射薄膜模型,利用在不同入射角度下薄膜对两种偏振态光波透射光谱,同时获得“雕塑”薄膜主轴折射率N1,N2,N3和薄膜厚度d及柱状角β等参数。基于倾斜沉积技术,利用电子束反应蒸发方法制备了氧化钽“雕塑”薄膜。借助于模拟退火算法,对入射角度为0,20°,30°,45°和60°时两种偏振态光波的透射光谱进行拟合,确定了氧化钽“雕塑”薄膜的结构参数,并与场发射扫描电镜测量的薄膜结构进行了比较。结果表明,利用透射光谱曲线可以较为准确地获得“雕塑”薄膜的结构参数。
Based on the biaxial birefringent film model, the transmission spectra of the two polarization states of light at different incident angles are obtained, and the parameters of the refractive index of the main axis of the film such as N1, N2, N3, the film thickness d and the columnar angle β are also obtained . Tantalum oxide “sculpture” film was prepared by electron beam evaporation method based on tilt deposition technique. With the help of simulated annealing algorithm, the transmission spectra of two polarized light waves with incident angles of 0, 20 °, 30 °, 45 ° and 60 ° were fitted to determine the structural parameters of the tantalum oxide film. And compared with the field emission scanning electron microscopy film structure. The results show that the structure parameters of the “sculpture” film can be obtained more accurately by using the transmission spectrum curve.