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Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Plasma enhanced chemical vapor deposition (PECVD) technique is very attractive to prepare DLC coating for MEMS.This paper describes the preparation of DLC films using twinned electron cyclotron resonance (ECR) microwave PECVD process.Raman spectra confirmed the DLC characteristics of the films.Fourier-transform infrared (FT-IR)characterization indicates the carbon is bonded in the form sp~3 and sp~2 with hydrogen participating in bonding.The surface roughness of the films is as low as approximately (0.093)nm measured with an atomic force microscope.A CERT microtribometer system is employed to obtain information about the scratch resistance,friction properties,and sliding wear resistance of the films.The results show the deposited DLC films have low friction and good scratch/wear resistance properties.
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear. Plasma enhanced chemical vapor deposition (PECVD) technique is very attractive to prepare DLC coatings for MEMS. This paper describes the preparation of DLC films using twinned electron cyclotron resonance (ECR) microwave PECVD process. Raman spectra confirmed the DLC characteristics of the films. Fourier-transform infrared (FT-IR) characterization indicates the carbon is bonded in the form sp ~ 3 and sp ~ 2 with hydrogen- in bonding. The surface roughness of the films is as low as approximately (0.093) nm measured with an atomic force microscope. A CERT microtribometer system is employed to obtain information about the scratch resistance, friction properties, and sliding wear resistance of the films. The results show the deposited DLC films have low friction and good scratch / wear resistance properties.