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本文说明了IC生产工艺的随机性及其给工艺控制和决策带来的困难。介绍了多元统计分析(MSA)软件包及其基本原理。用MSA软件包对23个参数的100组测试数据进行了分析,表明MsA软件包是分析IC生产线的工艺数据的有力工具,它可以从大量的测试数据中迅速、准确地找出工艺参数与器件参数或电路参数之间的联系及工艺中存在的关键问题,从而帮助工艺人员作出优化生产工艺的决策。
This article illustrates the randomness of IC manufacturing processes and their difficulties in process control and decision making. Introduced the multivariate statistical analysis (MSA) package and its basic principles. An analysis of 100 sets of test data from 23 parameters using the MSA software package shows that the MsA package is a powerful tool for analyzing process data from IC production lines and can quickly and accurately identify process parameters and devices from a wide range of test data Parameters or circuit parameters and the process of the key problems in the process to help craft personnel to make decisions to optimize the production process.