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报道了以乙酸铅、乙酸氧锆和钛酸正丁酯为原料，用溶胶-凝胶（Sol-Gel）法，经多次旋转涂膜，在Pt／Ti／SiO2／Si衬底上制备了PZT凝胶薄膜。用快速退火（RTA）作薄膜的热解和结晶热处理，制备了以（100）取向为主的PZT薄膜。用X射线衍射（XRD）和RT66A测试了膜的结晶取向、漏电流、电滞回线和抗疲劳性能等。结果表明，经RTA处理的溶胶凝胶法PZT膜具有良好的性能。
Reported that lead acetate, zirconyl acetate and n-butyl titanate were prepared on a Pt / Ti / SiO2 / Si substrate by spin-coating with a sol-gel method PZT gel film. PTA films with (100) orientation were prepared by rapid thermal annealing (RTA) as thin film pyrolysis and heat treatment. The crystal orientation, leakage current, hysteresis loop and anti-fatigue properties of the films were tested by X-ray diffraction (XRD) and RT66A. The results show that the RTA-treated sol-gel method PZT film has good performance.