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多层介质反射镜在非正入射的时候,两个不同的偏振态之间会产生不同的相移。通过优化设计,入射角为45°,在1285～1345nm之间p,s波获得了270°±0.15°的相移和99.5%以上的反射率。对使用的膜系进行了每层光学厚度的误差分析。用离子束溅射技术制备相位延迟膜,在大气中对样品进行不同温度的退火,用分光光度计测试了光谱特性和用椭偏仪测试了相位特性。结果表明,未退火的样品在相应波段获得了267.5°±0.5°的相移和99.6%以上的反射率;根据拟合分析,最外层的误差和折射率与设计值的偏差是发生相移偏小的主要因素;随着退火温度的升高、折射率变小和物理厚度变大,相移将变小。
Multi-layer dielectric mirrors produce different phase shifts between two different polarization states when not in normal incidence. By optimizing the design, the incident angle is 45 °, and the p and s waves have the phase shift of 270 ° ± 0.15 ° and the reflectivity above 99.5% at 1285 ~ 1345 nm. An error analysis of the optical thickness of each layer was performed on the film system used. Phase retarder films were prepared by ion beam sputtering, annealed at different temperatures in the atmosphere, tested for spectroscopic properties using a spectrophotometer, and tested for phase behavior using an ellipsometer. The results show that the unannealed samples have a phase shift of 267.5 ° ± 0.5 ° and a reflectivity above 99.6% in the corresponding wavelength band. According to the fitting analysis, the error of the outermost layer and the deviation of the refractive index from the designed value are shifted The smaller the main factor; as the annealing temperature increases, the refractive index becomes smaller and the physical thickness becomes larger, the phase shift will be smaller.