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在《小内径加热线圈的提出》一文及西德W.Keller的报告中,都以大量的实验数据证实了采用小内径加热线圈等工艺,是改善区熔硅单晶径向电阻率不均匀性的有效途径,但都缺乏理论上的论证。 本文对区熔法加热线圈所造成的熔区和磁场空间,分别建立了数学—物理模型,再从能量转化和能量守恒的原理出发,推导了在最佳耦合状态下加热线圈和原料直径的关系,最终获得了加热线圈内径计算公式。 加热线圈内径计算公式的原理和推导过程,实际上也是从理论上对小内径加热线圈得以改善径向电阻率不均匀性的机理,作了比较透彻的论证。
In his article “Proposing a Small Diameter Heating Coil” and W. W. Keller’s Report, a large number of experimental data confirm that using a small inner diameter heating coil and the like is an approach to improve the radial resistivity nonuniformity The effective way, but lacks the theoretical argument. Based on the principle of energy conversion and energy conservation, the relationship between the heating coil and the diameter of the raw material under the optimal coupling condition is deduced. , Finally obtained the heating coil diameter formula. The principle and the derivation process of the calculation formulas of the heating coil inner diameter are actually the theoretic proofs of the mechanism of improving the radial resistivity nonuniformity theoretically for the small inner diameter heating coils.