【摘 要】
:
人们已提出用BAlGaN四元系材料制备紫外光谱区的光发射器件.GaN和AlN二元系是这种四元材料在器件应用中的基础材料.6H-SiC衬底在氮化物生长中因其晶格失配小是一大优势,而且S
【机 构】
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DepartmentofElectronicEngineering
【基金项目】
:
Project supported by Grants-In Aid (No. 11750020 and No. 11650354) from the Ministry of Education, Science, Sports and Culture, and High-Tec Research Center in Private Universities. This work was carr