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通过对扩散反应方程的求解和无量纲分析给出了响应时间和恢复时间随膜厚、气体 浓度变化的关系式.由于气敏晶体尺寸r0→0时不能满足热力学极限,于是对Fermi 统计公式提出了修正,并由此推出了最佳晶粒尺寸r0*的计算公式,推导出了电导激活 能随膜厚变化的曲线.
Through the solution of diffusion reaction equation and dimensionless analysis, the relationship between response time and recovery time with the change of film thickness and gas concentration is given. Since the thermodynamic limit can not be satisfied when the size of the gas-sensing crystal is r0 → 0, Fermi’s statistical formula is revised and the formula of the optimal grain size r0 * is deduced. It is deduced that the conductance activation energy varies with the film thickness Curve.