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Several types of REBa2Cu3O7-x (REBCO, RE=Y, Ho etc.) films are prepared on single crystal substrate LaAlO3 by TFA-MOD method. The phase transformation and optimized growth conditions in the crystallization are studied. Compared with SmBCO and GdBCO, high quality YBCO and HoBCO films are relatively easy to produce. It is revealed that the YBCO grains can form at low temperatures such as 730°C during the initial heating ramp. With a high heating rate of 20 K/min and a low oxygen pressure of 100 ppm, the optimum growth temperature is around 780°C, at which the films show a Jc value of 2.88 MA/cm2. Further decrease of the heating rate may produce the high- quality YBCO film with a higher Jc of 3.65 MA/cm2. The temperature dependence of resistances in various magnetic fields up to 9 T shows that the present TFAMOD YBCO and HoBCO films have similar superonducting transition temperature and magnetotransport properties.