【摘 要】
：
本文讨论了SAW力传感器的基本工作原理。导出了SAW力传感器的测量方程,并对SAW力传感器进行了实验研究。该实验采用双通道结构,从而实现了传感器的自动温度补偿。传感器所用
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本文讨论了SAW力传感器的基本工作原理。导出了SAW力传感器的测量方程,并对SAW力传感器进行了实验研究。该实验采用双通道结构,从而实现了传感器的自动温度补偿。传感器所用的敏感换能元件是SAWR(SAW谐振器),其标称谐振频率为213MHz。实验表明SAW力传感器的输出频率与待测力之间具有确定的线性关系,该传感器在—21～+25℃温度范围内具有良好的温度稳定性。
This article discusses the basic working principle of SAW force sensors. The measurement equation of SAW force sensor is derived, and the SAW force sensor is experimentally studied. The experiment uses dual-channel structure, in order to achieve the sensor’s automatic temperature compensation. The sensitive transducing element used for the sensor is a SAWR (SAW resonator) with a nominal resonant frequency of 213 MHz. Experiments show that there is a definite linear relationship between the output frequency of the SAW force sensor and the force to be measured. The sensor has good temperature stability in the temperature range of -21 ~ + 25 ℃.
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