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采用蒙特-卡罗(Monte Carlo)模拟方法,研究了初始溅射粒子密度对其传输中的密度和速度分布以及环境气体密度分布的影响.结果表明,随着初始溅射粒子密度增大,烧蚀粒子和环境气体高密度峰的交叠区离开靶的最大距离减小,被衬底反弹后,距靶的最小距离减小,烧蚀粒子的速度分布随初始溅射粒子密度增大而变宽,当初始溅射粒子密度大于8.33×1025m-3时,出现速度劈裂现象.所得结论为进一步定量研究纳米晶粒的成核机理提供了基础.
The effects of initial sputtered particle density on the distribution of density and velocity and the distribution of ambient gas density were studied by using the Monte Carlo simulation method.The results show that with the initial sputtering particle density increasing, The maximum distance from the target to the overlapping area of the high-density peak of the eclogite and the ambient gas decreases, and the minimum distance from the target decreases after the substrate rebounds. The velocity distribution of the ablated particles changes with the density of the initial sputtered particles When the density of the initial sputtered particles is more than 8.33 × 1025m-3, the velocity splitting phenomenon appears, which provides the basis for further quantitative study of the nucleation mechanism of nanocrystalline grains.