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本文介绍了在半导体激光光纤和位相板相结合的准直情况下，利用面阵CCD探测器测量大尺寸形位误差的原理，并针对二维位相板衍射图像的特点，提出了一种处理此类衍射图样的图像处理新方法──正交投影法，消除了CCD表面保护玻璃形成的干涉条纹的影响，对空气扰动也起到了很好的抑制作用，并且使二维图像处理变为一维计算，大大提高了计算速度.此面阵CCD测量系统与双频激光干涉仪测量直线度误差的比对实验结果表明，二者的测量结果符合得很好，说明测量系统有很高的可信度。
In this paper, we introduce the principle of measuring the shape error of a large-size CCD with the combination of a semiconductor laser fiber and a phase plate. In view of the characteristic of the diffraction image of the 2D phase plate, The new method of image processing, the orthogonal projection method, eliminates the influence of interference fringes formed by the surface protection glass of CCD and also suppresses the air disturbance and makes the two-dimensional image processing into a one-dimensional Calculated, greatly increasing the speed of the calculation of the area array CCD measurement system and dual-frequency laser interferometer linearity measurement error of the experimental results show that the two measurements in good agreement, indicating that the measurement system is highly credible degree.