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对MEMORY仿真和CPU仿真进行了比较,分析了用MEMORY仿真技术开发光刻伺服驱动器成品样机的优越性,给出了MEMORY仿真器的原理框图,MEMORY仿真的研制及应用于光刻伺服驱动器的开发过程.
The comparison between MEMORY simulation and CPU simulation is analyzed. The advantages of using MEMORY simulation technology to develop prototype prototype of litho servo driver are analyzed. The block diagram of MEMORY simulator, the development of MEMORY simulation and the development of lithography servo driver are given process.