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以Piranha溶液处理玻璃基板,采用液相沉积技术,制备了钛酸锶晶态薄膜。改性基板的亲水性测定与偏光显微镜测试表明,Piranha溶液能够有效改善玻璃基板的亲水性,并且基板表面的硅烷醇对钛酸锶薄膜的沉积具有积极指导作用;X射线衍射(XRD)与扫描电镜(SEM)表征显示,制备成功的钛酸锶薄膜纯度高,结晶良好,样品表面均匀,在垂直基板表面方向上呈纤维花簇状生长。文章同时对基板表面硅烷醇形成过程进行了研究。
The glass substrate was treated with Piranha solution and the strontium titanate crystal film was prepared by liquid deposition technology. Hydrophilicity determination of the modified substrate and polarized light microscopy showed that the Piranha solution can effectively improve the hydrophilicity of the glass substrate, and silanol on the substrate surface has a positive effect on the deposition of the strontium titanate thin film. X-ray diffraction (XRD) Scanning electron microscopy (SEM) shows that the prepared strontium titanate film has high purity, good crystallinity, uniform sample surface and clusters of fiber flowers in the direction of the vertical substrate surface. The article also studied the formation of silanol on the substrate surface.