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本文就目前国际上流行的两种最为主要的旋涂成膜材料－光敏聚酰亚胺和SOG的理化性能、使用特点及其国内相关技术现状与今后的发展情况加以综述。
This review summarizes the physical and chemical properties of photosensitive polyimide and SOG, the current situation of their application and their future developments in the world.