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Yamamura指出:若能量为E的离子束倾斜轰击多晶元素靶,则原子相对溅射率y(θ)=Y(θ)/Y(0°)随离子束入射角θ变化的曲线可表示为含二个参数的经验公式:y(θ)=t~f·exp{g-(t-1)},t=secθ。其中,f和g是待定参数,其值由实验决定。g=f·cosθ_0,θ_0是元素溅射率Y(θ_0)达到最大值时的离子束最佳入射角。 我们导出了离子束的最佳入射角拟合公式(8),并讨论了它的物理意义。因而,含二个参数的Yamamura经验公式(1)变成只含一个参数的原子相对溅射率公式(4)。其中,待定参数f的值由解析公式(21)给出。
Yamamura pointed out that if the ion beam with an energy of E obliquely bombards the polycrystalline element target, the curve of atomic relative sputtering rate y (θ) = Y (θ) / Y (0 °) as a function of ion beam incident angle θ can be expressed as An empirical formula with two parameters: y (θ) = t ~ f · exp {g- (t-1)}, t = secθ. Among them, f and g are to be determined parameters, the value determined by the experiment. g = f · cos θ_0, θ_0 is the optimum incident angle of the ion beam when the elemental sputtering rate Y (θ_0) reaches a maximum value. We derive the fitting formula for the best angle of incidence for the ion beam (8) and discuss its physical meaning. Thus, the Yamamura empirical formula (1) with two parameters becomes the atomic relative sputter formula (4) with only one parameter. The value of the parameter to be determined f is given by the analytical formula (21).