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一、引论当蒸发一个单层透明膜的时候,每当蒸发的薄膜厚度达到λ_0/4的整数倍时,在λ_0波长处的透过率T或反射率R就会达到极值,光电监控仪的信息就会出现一个反转点。当多层膜的所有膜层都是λ_0/4型时,都会有此现象。利用光学薄膜的这一性质监控薄膜厚度的方法,人们一般称之为“极值法”。极值法监控可以分为两大类:一类是直接监控,即所有膜层都是直接地在所生产的元件上施加监控;另一类是间接监控,这时的监控是在一系列的比较片上进行。直接监控的好处在于所监控的就是
I. INTRODUCTION When evaporating a monolayer of transparent film, the transmittance T or reflectivity R at the λ_0 wavelength reaches its extreme value whenever the evaporated film thickness reaches an integral multiple of λ_0 / 4. Photoelectric monitoring There will be a reversal point in the meter’s message. This phenomenon occurs when all layers of the multilayer film are of type λ_0 / 4. The method of monitoring the thickness of a thin film using this property of an optical film is generally referred to as the “extreme method.” Extreme value monitoring can be divided into two categories: one is direct monitoring, that is, all layers are directly on the production of components to monitor; the other is indirect monitoring, then monitoring is in a series of Compare on-chip. The advantage of direct monitoring is that it is monitored