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提出了一种新的光刻机像质参数热漂移原位检测技术(TDFM)。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移(FFT)与放大倍率热漂移(MFT)的精确测量。与现有的放大倍率热漂移检测技术相比,该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题,简化了光刻机像质参数前馈校正的测试过程,测试成本与耗时均减少50%。
A new lithography machine image quality parameter thermal drift in-situ detection technology (TDFM) was proposed. The basic principle of using this technology to detect the best focal plane thermal drift and magnification thermal drift of projection objective with the mirror test mark is analyzed in detail. The experimental results show that TDFM technology can achieve the accurate measurement of the optimal focal thermal drift (FFT) and magnification thermal drift (MFT) simultaneously. Compared with the existing magnification thermal drift detection technology, this technology effectively solves the problem that magnification thermal drift is affected by the optimal focal plane thermal drift in the magnification thermal drift technology, simplifies the image quality parameter feed forward Corrected testing process, testing costs and time-consuming are reduced by 50%.