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本文对钛内扩散LiNbO_3光波导的制备和性能进行了研究.我们采用闭管扩散工艺和补Li措施,密闭长方形(77×23×21mm~3)白刚玉舟内放有与样品衬底相同化学配比的LiNbO_3粉和溅射过Ti的LiNbO_3片子,多数实验每次用新的LiNbO_3粉0.5克.由高频溅射高纯(99.99%)钛的办法,在y—切LiNbO_3衬底上淀积钛膜,在温度为1000℃,时间为八小时的扩散条件下发现,Ti膜厚度在192-460?)范围内,可获得单模波导(6328?).这种工艺使波导的制作十分简单,重复性好,而且既可抑制 Li_2O外扩散,又可获得低损耗(～1db/cm)光波导,因此这种工艺是合理的
In this paper, the preparation and properties of LiNbO 3 optical waveguide with titanium diffusion were studied.We used the closed-tube diffusion process and the Li-supplementing method, and the same chemistry as the sample substrate was placed in a closed rectangle (77 × 23 × 21mm ~ 3) Ratio of LiNbO_3 powder and sputtered TiNiO_3 film, the majority of experiments each time with new LiNbO_3 powder 0.5 grams by high-frequency sputtering of high purity (99.99%) titanium method, y-cut LiNbO_3 substrate on the lake Titanium-titanium film, found at a temperature of 1000 ℃, the time for eight hours under the conditions of diffusion found Ti film thickness in the range of 192-460?), Can be obtained single mode waveguide (6328?) This process makes the waveguide is very Simple, repeatable, and can both inhibit Li 2 O diffusion outside, but also get low loss (~ 1db / cm) optical waveguide, so this process is reasonable