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溅射离子系进行稳定状态的抽气特性决定于放电强度（ Ｉ／Ｐ）和抽气效率 （Ｓｐ／Ｉ）。这种泵采用磁性来限制冷阴极气体放电。可以在进入超高真空和更低的压强范围内进行工作。许多经验证明了，放电强度在不同程度上是依赖于下列有关参数：电压、磁场、电极几何形状、电极材料、气体的种类和压强。这种放电的理论与圆满解释是仍旧相差很远。在放电格子中观察到空间电行对改变电位起主要作用。在这里可近似地认为，放电强度与阳极电压和阴极长度成比例。但是，与作为乘积（即磁场×阳极直径）为常数的阳极直径无关。另外，关于要求的放电强度，用潘宁正磁控管和反磁控管室作一下比较。 对于在放电中产生的每一个阳离子，抽除的气体分子的数目成比例的量（Ｓｐ／Ｉ）提供出一种油气效率的测量方法。由于化学活泼性气体与从阴极溅射出来的收气剂材料，化合作用产生的抽气作用最低限度在理性上能很好地理解。至少在实验上，由离子埋葬吸附和扩散到阴极里的对氢的抽气作用亦能很好地建立。但是对惰性气体的抽气有时也涉及了这些方面。对于普通二极型和早期（两个电位）的三极型溅射离子泵。表面上，对氢的抽气已作了满意的说明。这种说明对最近（单电位）的三极型泵也未必适用，对采用不同材料的双阴极的二
Sputtering ionization The steady-state pumping characteristics are determined by the discharge intensity (I / P) and the pumping efficiency (Sp / I). This pump uses magnetism to limit cold cathode gas discharges. Work in ultra-high vacuum and lower pressure range. Many experience has shown that the discharge intensity depends to varying degrees on the following relevant parameters: voltage, magnetic field, electrode geometry, electrode material, gas type and pressure. This theory of discharge and the successful explanation is still a long way from. It is observed in the discharge lattice that the electrical conduct of the space plays a major role in changing the potential. It is approximately assumed here that the discharge intensity is proportional to the anode voltage and cathode length. However, it is independent of the anode diameter which is a constant of the product (ie, magnetic field × anode diameter). In addition, for the required discharge intensity, with Penning positive magnetrons and anti-magnetron chamber for a comparison. For each cation generated in the discharge, the proportional amount of gas molecules withdrawn (Sp / I) provides a measure of hydrocarbon efficiency. As a result of the chemically active gas and the getter material sputtered from the cathode, the pumping action of the compounding is reasonably well understood. At least experimentally, the suction of hydrogen by ion bombardment and diffusion into the cathode can also be well established. However, pumping of inert gas sometimes involves these aspects. For ordinary bipolar and early (two potentials) of the triode sputtering ion pump. On the surface, hydrogen extraction has been satisfactorily described. This description of the recent (unipotential) of the three-pole pump may not be applicable to different materials using the double cathode two