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通过厚膜力敏工艺技术和厚膜混合集成技术的结合,研制成功厚膜集成压力传感器,能直接和显示仪表连接。为传感器的集成化作了有益的尝试,具有广阔的研究开发前景。
Through thick-film force sensitive technology and thick film hybrid integration technology, the successful development of thick film integrated pressure sensor, can be directly connected with the display instrument. For the sensor integration made a useful attempt, with a broad research and development prospects.