硅光学压力传感器

• 作 者: J.A.Dziuban 范仁春
• 出 处: 现代计量测试
• 发表日期: 1993年02期
• 关键词: 压力传感器 光强测量 文献描述 传感器组 输出信号 大量生产 照明强度 前视图 金属框架 输出电压

1.前言虽然已有文献描述了多种形式的硅压力传感器,且其中一些已经大量生产,但新型的压力传感器仍在开发,其中尤以硅光纤压力传感器扮演了重要的角色。一种薄硅薄有良好的机械性能,当加上气压或液压时可以重复弯曲,薄的位移可以通过图1所示的光强测量系统来测定。

1. Preface Although a variety of forms of silicon pressure sensors have been described in the literature and some of them have been mass produced, new types of pressure sensors are still being developed. Silicon optical fiber pressure sensors, in particular, play an important role. A thin silicon thin with good mechanical properties, when coupled with pressure or hydraulic pressure can be repeated bending, thin displacement can be measured by the light intensity measurement system shown in Figure 1.