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结合超精密制造技术,讨论了轮廓仪测量大曲率半径表面形貌存在的精度缺陷。提出了利用NIKONAutocollimator 6D自准直仪辅助Form Talysurf PGI 1250A以提高轮廓仪测量精度的改进方法。当自准直仪的光轴与样品顶点的法线共轴时,旋转样品其顶点的法线方向不变,因此自准直仪的反射像位置也不会变,并且自准直仪有很高的精度,从而可将其用于寻找顶点。基于相关参数对提高轮廓仪测量精度进行了理论计算和Zemax模拟。搭建实验装置对不同曲率半径的样品进行测量,与改进前实验结果进行对比,证明了轮廓仪测量精度提高到原来的2～4倍,适用于测量大曲率半径表面形貌,验证了改进方法的合理性和有效性。
Combined with the ultra-precision manufacturing technology, the accuracy defects of surface profile with large curvature radius measured by profiler are discussed. An improved method of using the NIKONAutocollimator 6D autocollimator to assist the Form Talysurf PGI 1250A is proposed to improve the accuracy of profiler measurement. When the optical axis of the autocollimator is coaxial with the normal of the sample vertex, the normal direction of the vertex of the rotated sample is constant, so the position of the reflected image of the autocollimator does not change, and the autocollimator has a very good High precision, which can be used to find the vertex. Based on the related parameters, the theoretical calculation and Zemax simulation for improving the measurement accuracy of profiler were carried out. The experimental setup was used to measure the samples with different radii of curvature. Compared with the experimental results before the improvement, the accuracy of the profilometer was improved by 2 ~ 4 times, which is suitable for measuring the surface topography with large radius of curvature. Reasonable and effective.