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对半导体器件模拟软件系统的构造进行了全面系统的分析,对所涉及到的关键问题进行了深入讨论。研究了适合于深亚微米半导体器件的流体动力学模型的物理实质、相互关系和选取原则,总结了非线性偏微分方程组系统的离散技术,提出了可行的迭代求解算法与方法,完成了面向对象的模拟软件结构分析与系统设计,初步探讨了基于CORBA 平台下并行计算方案的实验及其有效性
The structure of the semiconductor device simulation software system has been analyzed in a comprehensive and systematic manner, and the key issues involved have been discussed in depth. The physical essences, interrelations and selection principles of hydrodynamic models suitable for deep sub-micron semiconductor devices are studied. Discrete techniques for systems of nonlinear partial differential equations are summarized. A feasible iterative solution algorithm and method are proposed. Object simulation software structure analysis and system design, preliminary discussion based on CORBA platform parallel computing scheme experiment and its effectiveness