Modulus and Hardness Change of Silicon and Sapphire Substrates by TiC/VC Multilayer Coatings

来源 :材料科学与应用期刊(英文) | 被引量 : 0次 | 上传用户：liongliong431

【摘要】

：

The nanohardness H of multilayer specimens TiC/VC@Si and TiC/VC@Sapphire prepared by Pulsed-Laser-Deposition is investigated to check the existence of a superla

【作者】

：

André Belger Marianne Rei

【机构】

：

Institutfü,rStrukturphysik,OnLeavefromInstitutfü,rStrukturphysik,TriebenbergLaboratory

【出处】

：

材料科学与应用期刊(英文)

【发表日期】

：

2012年4期

【关键词】

：

TiC/VC@Si or SAPPHIRE MULTILAYERS SUPERLATTICE Effect X-Ray Absorption Spectrome

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The nanohardness H of multilayer specimens TiC/VC@Si and TiC/VC@Sapphire prepared by Pulsed-Laser-Deposition is investigated to check the existence of a superlattice effect as known from TiN/VN multilayers. In the present work the multilayer period thickn

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Modulus and Hardness Change of Silicon and Sapphire Substrates by TiC/VC Multilayer Coatings

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