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采用松理化学气相沉积（即ＰＣＶＤ）技术，在不同的温度和时间下制备２组ＴｉＮ涂层试样；讨论了温度与时间对涂层性能的影响，并在微观结构分析基础上，讨论了时间和温度等工艺参数与微观结构和性能间的关系
Two sets of TiN coating samples were prepared at different temperatures and times by using the PCVD technique. The effects of temperature and time on the coating properties were discussed. Based on the analysis of the microstructure, the time And temperature and other process parameters and the relationship between microstructure and properties