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设计了一种新型静电驱动双向平动的MEMS变形镜,其结构包括3部分:中央下电极,4个静电驱动杠杆结构以及反射镜面(上电极).该变形镜有两种驱动模式:向下驱动模式和向上驱动模式.在向上驱动时,4个杠杆结构实现了位移的放大;向下驱动时,利用了非线性弹性系数法扩展了镜面的平动范围.采用表面硅工艺完成了变形镜的加工.通过白光干涉仪对变形镜的测试表明:在向上驱动模式下,变形镜在驱动电压为31 V时位移达到1.1μm;在向下驱动模式下,变形镜在6 V的驱动电压下位移达到1.1μm.变形镜的总行程为2.2μm,达到了同样工艺下传统变形镜的3倍左右.
A novel electrostatically actuated bidirectional translational MEMS deformable mirror is constructed, which consists of three parts: a central lower electrode, four electrostatically driven lever structures and a mirror surface (upper electrode). The deformable mirror has two driving modes: downward Drive mode and upward drive mode.While driving upwards, the four lever structures realize the magnification of the displacement.When driving downwards, the non-linear elastic coefficient method is used to extend the translational range of the mirror.The deforming mirror The test of the deformable mirror by the white light interferometer shows that in the upward driving mode, the deformable mirror reaches the displacement of 1.1μm at the driving voltage of 31 V; in the downward driving mode, the deformable mirror operates at the driving voltage of 6 V Displacement reached 1.1μm. The total length of the deformable mirror 2.2μm, reached the same process about 3 times the traditional deformable mirror.