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本文建立了ACPDP单元放电的一维流体模型,对ACPDP单元的多脉冲放电特性进行了数值分析.模型是基于对电子和离子输运的二元流体描述,包括各种粒子的连续性方程和简单的动量传输方程以及Poisson方程和电路方程.计算过程中,假定放电气体为He且处于局域平衡状态,各种粒子的反应几率设为E/P的函数,通过Boltzmann方程解出.模拟了在50kHz方波电压驱动下发生在ACPDP单元内的多脉冲放电行为,给出了放电过程中电压、电流以及各种粒子密度、电位等参量随时间的变化及其在空间的分布.
In this paper, a one-dimensional fluid model of ACPDP cell discharge was established and the multi-pulse discharge characteristics of ACPDP cell were numerically analyzed.The model was based on binary fluid description of electron and ion transport, including continuity equations of various particles and simple The momentum transfer equation and the Poisson equation and the circuit equation were calculated, assuming that the discharge gas is He and in a local equilibrium state, the reaction probability of various particles is set as a function of E / P and solved by the Boltzmann equation, Multipulse discharge occurred in the ACPDP cell driven by 50kHz square wave voltage, and the variation with time and the distribution of the parameters such as voltage, current, various particle densities and potentials in space during discharge were given.