论文部分内容阅读
提出了一种带有反馈系统的半导体激光正弦相位调制干涉仪。该干涉仪可以实现对微小振动的高精度实时测量。通过一个简单的信号处理系统对干涉信号进行分析 ,获得实际振动的振幅和频率。由于引入反馈系统 ,减低了测量误差 ,排除了环境噪声的影响。给出了具体的理论分析和实验结果
A semiconductor laser sinusoidal phase modulation interferometer with a feedback system is proposed. The interferometer enables high-precision, real-time measurement of minute vibrations. The interference signal is analyzed by a simple signal processing system to obtain the amplitude and frequency of the actual vibration. Due to the introduction of feedback system, the measurement error is reduced and the influence of environmental noise is eliminated. Given the theoretical analysis and experimental results