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在温度传感器校准中,用激光光束对其进行加热,由于激光呈高斯分布,为了使传感器受热均匀,需要能量均匀分布的激光光束。为此,研究了激光匀束的方法,最终选用结构简单、对入射光束变化不敏感且可以承受大功率的衍射型微透镜阵列对激光进行整形。运用ZEMAX光束仿真软件进行仿真分析,通过对子透镜尺寸、透镜间距离、光束发散角等因素的对比分析,优化出较合适的参数。搭建实验平台,对实际效果进行验证,得到一个不均匀度为8.9%,能量损耗为7%的一个平顶光束。减小传感器校准误差,同时极大的提高了激光的利用率。
In the calibration of the temperature sensor, it is heated by the laser beam. Due to the Gaussian distribution of the laser beam, a laser beam with uniform energy distribution is needed for uniform heating of the sensor. To this end, the method of laser beam homogenization is studied. Finally, the laser is shaped by using a diffractive microlens array which is simple in structure, insensitive to incident beam changes and can withstand high power. Using ZEMAX beam simulation software for simulation analysis, through the comparative analysis of sub-lens size, lens distance, beam divergence angle and other factors, to optimize the more appropriate parameters. An experimental platform was set up to verify the actual results and obtain a flattened beam with an unevenness of 8.9% and an energy loss of 7%. Reduce the sensor calibration error, while greatly improving the utilization of the laser.