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用粉末冶金方法制备了用作半导体基片的低膨胀、高导热、高导电复合材料。研究了粉末粒度对材料电阻率的影响,发现实验测得的电阻率比理论值大得多,这主要是由于不同相之间原子相互扩散的结果。而粉末粒度则通过影响不同相之间的扩散以及相的不同分布状态影响材料的导电性能。高导电相成网络分布,有利于提高复合材料的导电性能。
A low-expansion, high-thermal-conductivity and high-conductivity composite material for semiconductor substrates was prepared by a powder metallurgy method. The effect of powder particle size on the resistivity of the material was investigated. It was found that the measured resistivity was much larger than the theoretical value, mainly due to the mutual diffusion of atoms between different phases. Powder particle size affects the conductivity of the material by affecting the diffusion between different phases and the different distribution of phases. High-conductivity phase network distribution, is conducive to improving the conductivity of composite materials.