论文部分内容阅读
利用电弧离子镀技术在不锈钢基体上制备了(Ti,Al)N涂层,研究了N_2分压改变对涂层残余应力沿层深分布及相关力学性能的影响.结果表明,低N_2分压下,(Ti,Al)N涂层残余应力沿层深分布较均匀,随N_2分压的增加,涂层应力沿层深呈“钟罩型”分布,且全膜厚的应力值也明显增大;通过对涂层生长结构及微观成分分析,初步探讨了应力分布机理.随N_2分压的增加,涂层硬度会显著增加,而膜/基结合力则大幅下降;采用改变N_2分压工艺制备(Ti,Al)N涂层,可有效调整涂层残余应力沿层深分布趋势,改善其力学性能,并可成功制备厚度在130μm以上的硬质涂层.
The (Ti, Al) N coating was prepared on stainless steel substrate by arc ion plating technique, and the influence of partial pressure of N 2 on the distribution of residual stress along the layer and the related mechanical properties were studied. The results show that under low N 2 partial pressure The residual stress of (Ti, Al) N coating distributes more evenly along the layer. With the increase of partial pressure of N 2, the stress of coating is distributed as “bell-type” The mechanism of the stress distribution was discussed preliminarily by analyzing the growth structure and microstructure of the coating.With the increase of the partial pressure of N 2, the hardness of the coating increased significantly and the membrane / base bonding force decreased sharply. The (Ti, Al) N coating can effectively adjust the distribution of residual stress along the layer and improve its mechanical properties. The hard coating with the thickness of more than 130μm can be successfully prepared.