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要实现X射线干涉测量,关键是Moire条纹要有良好的对比度,接收信号要有足够的强度。影响Moire条纹对比度及信号强度的因素很多,仅对通过优化干涉仪中晶片的尺寸实现Moire条纹高对比度及信号高强度的方法进行了理论分析。
To achieve X-ray interference measurements, the key is Moire stripes to have good contrast, the received signal to have sufficient strength. There are many factors that affect Moire fringe contrast and signal intensity, and only theoretical analysis of Moire fringe high contrast and signal intensity by optimizing the size of the wafer in the interferometer.