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本文采用激光辅助化学气相沉积法合成了厚度为１５μｍ的金刚石薄膜。实验结果表明：以丙酮为碳源气体，并用ＸｅＣｌ（３０８ｎｍ）准分子激光解离，Ｈ２用灯丝进行予先解离，适当选择和控制各种实验参数，可获得高质量的金刚石薄膜。本文还讨论了衬底温度以及灯丝温度等实验参数对薄膜生长速率与薄膜质量的影响
In this paper, laser-assisted chemical vapor deposition was used to synthesize a diamond film with a thickness of 15μm. The experimental results show that high quality diamond films can be obtained by using acetone as carbon source gas, dissociating with XeCl (308nm) excimer laser and pre-dissociation of H2 by filament. Appropriate selection and control of various experimental parameters can be achieved. The effects of substrate temperature and filament temperature on the film growth rate and film quality are also discussed