论文部分内容阅读
晶体在固态器件中的日益广泛而重要的应用是与其各向异性的特征分不开的,准确、精密的定向则是器件工艺中重要的一环.晶体的光学定向法是在晶体的实际定向工作中应用得最普遍的一种,不仅因其设备简单,操作方便,而且由于定向的正确度较高而深受欢迎.例如硅单晶体用NaOH腐蚀后,其定向精度在几弧分范围.在常规的晶体定向工作中,能否正确定向一般取决于光图象是否清晰、明锐.本文试从定向原理出发,对光图象作一正确鉴别以及采用光电池接收光图象上光斑的信号,作出欲定晶向的准确判断.
The increasingly wide and important application of crystal in the solid state device is inseparable from its anisotropic characteristics, accurate and precise orientation is an important part of the process of the device. The optical orientation of the crystal is the actual orientation of the crystal Work is the most common one, not only because of its simple equipment, easy operation, but also due to the high orientation accuracy of popular, such as silicon single crystal with NaOH corrosion, the orientation accuracy of a few arc minutes in the range Conventional crystal orientation work, the correct orientation generally depends on whether the light image is clear, Octagonal.This paper try to proceed from the principle of orientation, a correct identification of light images and the use of photovoltaic cells to receive light spot on the light signal to make To determine the exact direction to crystal.