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由于各种原因,在制作光学多层膜系时,各层的厚度都偏离理想数值,结果常常造成滤波器性能不佳。本文介绍以监控单色透射率为基础,在一定程度上补偿这些误差的无吸收多层膜镀制方法。在各层膜沉积之后,计算机程序给出实际监控数据,根据这些数据推导出膜层的厚度。之后,通过其余层的厚度变化,计算程序可使系统性能最佳化。我们对在玻璃上制作的七层中性分光镜进行了数字和试验研究。本文提供在玻璃上镀 AR 层的理
For various reasons, the thickness of each layer deviates from the ideal value in the fabrication of optical multilayer films, often resulting in poor filter performance. This article describes a non-absorbent multi-layer film plating method that compensates for these errors to a certain extent on the basis of monitoring monochromatic transmittance. After each layer of film is deposited, the computer program gives actual monitoring data from which the thickness of the film is deduced. Later, through the thickness variation of the remaining layers, the calculation program can optimize system performance. We conducted a numerical and experimental study of seven layers of neutral beamsplitters made on glass. This article provides an AR layer on glass