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前言用X-射线荧光光谱仪对薄表面层的元素定量分析和测厚,人们已做过大量工作,还有人对基材与表面层中间的夹层质量吸收系数做过研究。也曾有人用X-射线透射法做过光谱定量分析。在前人工作的基础上,结合我们工作需要,采用吸收校正手段完成了X-射线透射法光谱定量分析。本方法具有原理简单、测试方便、不破坏样品等优点。对电镀、涂料和半导体等工业分析有一定的实用价值。
Preface The quantitative analysis and thickness measurement of thin surface layers by X-ray fluorescence spectrometry have done a great deal of work and others have studied the interlayer mass absorption coefficient between the substrate and the surface layer. Some people have done X-ray transmission spectroscopy quantitative analysis. Based on the previous work, combined with the needs of our work, using absorption correction method to complete the X-ray spectrometry quantitative analysis. The method has the advantages of simple principle, convenient testing, no damage to samples and the like. The electroplating, coatings and semiconductors and other industrial analysis has some practical value.