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计算了薄膜在高功率脉冲激光作用下截面温度场和应力分布场 .分析了热冲击在光学薄膜激光损伤中的作用，并用调 Q 1. 06μ m脉冲激光对 Z_rO_2单层薄膜损伤，讨论了不同激光强度下薄膜截面温度场与应力场分布，揭示了热冲击在 Z_rO_2单层膜损伤中的机理和过程 .
The temperature field and stress distribution of the film under the high power pulsed laser were calculated.The effect of thermal shock on the laser damage of the optical film was analyzed and the damage of Z_rO_2 monolayer thin film was investigated by Q. 1.06 μm pulsed laser, The temperature field and stress field distribution of the film under laser intensity reveal the mechanism and process of thermal shock in the damage of Z_rO_2 monolayer.