论文部分内容阅读
CYX横向压阻型压力传感器是八十年代出现的一种新颖的力敏器件。它在压敏部分采用单一的硅扩散电阻,替代目前流行的由四个电阻组成的惠斯登电桥结构,从而避免了惠斯登电桥结构的弱点,使其最终的测试精度比采用电桥结构的力敏器件高出一个数量级。同时由于该器仆有很高的稳定性和可靠性,已经在流体测量领域中显示出极好的前景,大有替代其它测量工具而成为主流器件的势头。本文介绍该力敏器件的工作原理及其在流体测量中的应用概况。
CYX lateral piezoresistive pressure sensor is a novel force-sensitive device appeared in the eighties. It uses a single silicon diffusion resistor in the pressure sensitive part to replace the popular Wheatstone bridge structure consisting of four resistors, thus avoiding the weaknesses of the Wheatstone bridge structure and making it ultimately more accurate than using electricity Bridge structure of the force-sensitive device is an order of magnitude higher. At the same time, due to its high stability and reliability, this device has shown an excellent prospect in the field of fluid measurement. It is a great alternative to other measurement tools and becomes the mainstream device. This article describes the principle of the force-sensitive device and its application in fluid measurement.