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介绍了一种基于激光干涉的长导轨直线度误差测量系统。由氦氖激光器产生激光光束,经准直后投射到被置于被测导轨上作为接收靶的楔形光学玻璃板上,产生干涉。将接收靶沿被测导轨移动,如果导轨有直线度误差,则接收靶过桥与导轨的接触点所形成的直线角度发生变化,导致干涉条纹发生移动,通过检测干涉条纹变化量就可以得到导轨的直线度误差。将光电传感器检测得到的干涉条纹移动量送入单片机系统处理,得到被测点相对于准直光束的偏移量。最后对系统进行了实测实验。实验表明:用该装置检测长度为50m的长导轨,直线度误差仅为623.103μm。
A measurement system of straightness error of long guideway based on laser interference is introduced. A laser beam is generated by a HeNe laser and collimated and projected onto a wedge-shaped optical glass plate placed on the track under test as a receiving target, causing interference. If the guide rail has straightness error, the straight line angle formed by the contact point between the receiving target bridge and the guide rail changes, causing the interference fringes to move. By detecting the variation of the interference fringes, the guide rail can be obtained The straightness error. The photoelectric sensor detects the interference fringe movement into the single-chip microcomputer system processing, the measured point relative to the collimated beam offset. Finally, the system was measured experiment. Experiments show that: With the device to detect the long guide rail length of 50m, the straightness error is only 623.103μm.