APPLICATION OF THE ¹⁶O（α,α） ¹⁶O RESONANCE ELASTIC SCAT

• 作 者: 杨国华 朱德彰 曹建清 朱福英 刘惠珍 江丙尧 潘浩昌
• 机 构: ShanghaiInstituteofNuclearResearchAcademiaSinicaShanghai201800China,ShanghaiInstituteofNuclearResear
• 出 处: 核技术：英文版
• 发表日期: 1991年1期
• 关键词: RESONANCE elastic SCATTERING OXYGEN depth PROFILING SIMOX structure Resonance el

The resonance nuclear elastic scattering 16O(α,α) 16O at 3.045 MeV has been used to profile oxygen distributions in SOI material synthesised by SIMOX technique. The buried SiO2 layer is produced by 1.8×1018 at./cm2 oxygen implantation at 500℃ and hig