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研究了变形参数,热膨胀和冷却方式对钨钼复合靶残余应力的影响。结果表明:锻造温度越高,锻造能量越大,残余应力越大;钨钼热膨胀不同引起的残余应力在钼层表面表现为拉应力,大小为73MPa~135MPa;快冷使得钼层表面表现为压应力。当残余拉应力达到一定值时,将引起应力裂纹,这种裂纹长且细。
The effects of deformation parameters, thermal expansion and cooling modes on the residual stress of tungsten-molybdenum composite target were studied. The results show that the higher the forging temperature is, the larger the forging energy is, and the larger the residual stress is. The residual stresses caused by the thermal expansion of tungsten and molybdenum are tensile stress on the surface of molybdenum layer with the size of 73MPa ~ 135MPa. stress. When the residual tensile stress reaches a certain value, it will cause stress cracks, such cracks long and thin.