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介绍了以硝酸锆、钛酸丁酯、乙酸铅为原料 ,去离子水、乙二醇乙醚为溶剂 ,采用新型Sol Gel技术 ,即将PZT陶瓷粉末分散于PZTSol中 ,形成均匀、稳定的厚膜材料先体溶液 ,再制备厚膜的方法 ,成功地制备出 2～ 5 0 μm厚的新型 0 3型PZT厚膜材料 .XRD谱分析显示 ,PZT厚膜呈现出纯钙钛矿相结构 ,无焦绿石相存在 .SEM电镜照片显示 ,PZT厚膜均匀一致 ,无裂纹、高致密 .介电性能测试结果表明 ,PZT厚膜具有优良的介电性能 .当测试频率为 1kHz ,温度为 15℃时 ,介电常数约为 860 ,介电损耗为 0 .0 3左右
A new type of Sol Gel technology was introduced using zirconium nitrate, butyl titanate and lead acetate as raw materials, deionized water and ethylene glycol ether as solvent, and PZT ceramic powder was dispersed in PZTSol to form a uniform and stable thick film material Precursor solution and then thick film, the new type 0 3 PZT thick film material with a thickness of 2 ~ 500 μm was successfully prepared.XRD spectrum analysis showed that the pure PZT thick film showed a pure perovskite phase structure without pyrochlore SEM images show that the PZT thick film is uniform, crack-free and highly dense.The results of dielectric properties show that the PZT thick film has excellent dielectric properties.When the test frequency is 1kHz and the temperature is 15 ℃, The electrical constant is about 860 and the dielectric loss is about .03