Structures of Diamond-Like Carbon Films

• 作 者: 刘东平 陈宝祥 刘艳红
• 机 构: Department of Mathematics and Physics, Dalian Nationality University, Dalian 116600 China,State Key
• 出 处: Plasma Science and Technology
• 发表日期: 2006年03期
• 关键词: extreme Diamond diamond hardness covalent dense attributed aromatic bonded bonds

The structures of diamond-like carbon (DLC) films, including a-C:H, a-C, ta-C:H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that. sp~2 C in a-C:H and a-C. films tends to form olefinic and aromatic groups while sp~3 C in ta-C:H and ta-C films tends to form single or multiple sixfold groups. The hydrogen atoms in hydrogenated DLC films contribute to stabilizing the carbon skeletal networks. The film structures are well related to their properties such as optical gaps, density and hardness. The results also indicate that the high density and the extreme hardness of ta-C fihns are attributed to the forming of large sp~3 C bonded sixfold groups.

The structures of diamond-like carbon (DLC) films, including aC: H, aC, ta-C: H and ta-C films have been investigated as a random covalent network with a dense film structure. 2 C in aC: H and aC. Films to form olefinic and aromatic groups while sp ~ 3 C in ta-C: H and ta-C films tend to form single or multiple six fold groups. The hydrogen atoms in hydrogenated DLC films to stabilizing the carbon skeletal networks. The results also indicate that the high density and the extreme hardness of ta-C fihns are attributed to the forming of large sp ~ 3 C bonded sixfold groups.