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采用电弧离子镀工艺对聚四氟乙烯(PTFE)制备了TiN镀层。采用扫描电子显微镜(SEM)、X射线衍射(XRD)和能谱分析(EDS)等手段对镀层的形貌、结构、成分及含量进行了表征。实验结果表明:镀层具有黄色金属光泽,在SEM下观察,镀膜有明显凹坑,由2-4μm的颗粒组成,部分颗粒呈现白色,分布不均匀。XRD和EDS分析表明:TiN膜中含有一定的Ti成分。镀膜处理不改变聚四氟乙烯晶体结构取向和有序性,并且增加了聚四氟乙烯的表面粗糙度。
TiN coating was prepared on polytetrafluoroethylene (PTFE) by arc ion plating. The morphology, structure, composition and content of the coating were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and energy dispersive spectroscopy (EDS) The experimental results show that the coating has a yellow metallic luster. When observed under a SEM, the coating has obvious dimples and is composed of 2-4 μm particles. Part of the particles are white and unevenly distributed. XRD and EDS analysis showed that TiN film contains some Ti. The coating treatment does not change the orientation and the order of the polytetrafluoroethylene crystal structure, and increases the surface roughness of the polytetrafluoroethylene.