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将高压铝电解电容器用腐蚀铝箔与沸水反应,然后再在硼酸溶液或硼酸-柠檬酸混合酸溶液中进行530V高压阳极氧化制得耐压薄膜,应用透射电镜(TEM)、X射线衍射(XRD)研究不同电解液所形成的高压阳极氧化膜的微观结构与结晶程度,利用电化学交流阻抗(EIS)、LCR数字电桥与小电流充电测试阳极氧化膜的电化学性能。结果表明:高压阳极氧化膜具有明显层状结构,内层结晶程度较高、外层结晶程度较低;与单纯硼酸溶液所形成的氧化膜相比,混合酸液所形成的阳极氧化膜的外层结晶程度与晶粒平均尺寸较大,抗电场强度与比电容均比较高,但相变使得氧化膜外层微观缺陷密度增多,氧化膜比电阻与耐电压值有所降低。
The high voltage aluminum electrolytic capacitor was reacted with boiling water by etching aluminum foil and then with a 530V high pressure anodization in boric acid solution or boric acid-citric acid mixed acid solution to prepare the pressure-resistant film. Transmission electron microscopy (TEM), X-ray diffraction (XRD) The microstructure and degree of crystallization of high voltage anodic oxide films formed by different electrolytes were studied. The electrochemical properties of anodic oxide films were tested by electrochemical alternating current impedance (EIS), LCR digital bridge and low current charge. The results show that the high-voltage anodic oxide film has a lamellar structure with a high degree of crystallization in the inner layer and a low degree of crystallization in the outer layer. Compared with the oxide film formed by the simple boric acid solution, the anodic oxide film formed by the mixed acid solution The degree of crystallization and the average grain size are larger, and the electric field strength and specific capacitance are higher. However, the phase transition causes the density of the micro-defects in the outer layer of the oxide film to increase, and the specific resistance and withstand voltage of the oxide film decrease.