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采用阳极氧化技术在纯Ti表面制备出有序的TiO2纳米管阵列,并通过SEM,XRD,XPS对TiO2纳米管阵列进行表征。结果表明,阳极氧化时间对纳米管的形成有较大的影响。在外加电压为20V,阳极氧化时间为20min时,可制备出长度约480nm、内径约89.90nm、壁厚约7.4nm的TiO2纳米管阵列。经450℃热处理后,可得到锐钛矿型的TiO2纳米管阵列,钛元素以Ti4+氧化态处于八面体的环境中,Ti2p3/2的结合能为459.3eV。
The ordered TiO2 nanotube arrays were prepared on the pure Ti surface by anodic oxidation and the TiO2 nanotube arrays were characterized by SEM, XRD and XPS. The results show that the anodic oxidation time has a great influence on the formation of nanotubes. At an applied voltage of 20 V and an anodization time of 20 min, a TiO2 nanotube array with a length of about 480 nm, an inner diameter of about 89.90 nm and a wall thickness of about 7.4 nm can be prepared. After heat treatment at 450 ℃, an anatase TiO2 nanotube array can be obtained. Titanium is in the octahedron with Ti4 + oxidation state and the binding energy of Ti2p3 / 2 is 459.3eV.